Fabrication and Characterization of Bending- Independent Capacitive CMOS Pressure Sensor Stacks
نویسندگان
چکیده
منابع مشابه
MEMS Capacitive Relative Humidity Sensor Design, Fabrication, and Characterization
The motivating principle behind this research is the development of a small, wearable sensor that would use humidity and temperature measurements as metrics for health monitoring. We have successfully fabricated macro-scale devices via pressing of a polymer between two aluminum plates, and the responses of these capacitors were tested in various humidity conditions. The transition from macro to...
متن کاملFabrication and Characterization of a CMOS-MEMS Humidity Sensor
This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensing principle is based on the change in amplitude of the device due to adsorption or desorption of...
متن کاملFabrication of Wireless Micro Pressure Sensor Using the CMOS Process
In this study, we fabricated a wireless micro FET (field effect transistor) pressure sensor based on the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The wireless micro pressure sensor is composed of a FET pressure sensor, an oscillator, an amplifier and an antenna. The oscillator is adopted to generate an ac signal, and the amplifier is used to amplify ...
متن کاملDesign of High Sensitivity and Linearity Microelectromechanical Systems Capacitive Tire Pressure Sensor using Stepped Membrane
This paper is focused on a novel design of stepped diaphragm for MEMS capacitive pressure sensor used in tire pressure monitoring system. The structure of sensor diaphragm plays a key role for determining the sensitivity of the sensor and the non-linearity of the output.First the structures of two capacitive pressure sensors with clamped square flatdiaphragms, with different thicknesses are inv...
متن کاملLow Parasitic Capacitance and Low-Power CMOS Capacitive Fingerprint Sensor
In this paper, a low parasitic capacitance and low-power CMOS capacitive fingerprint sensor readout circuit is presented. The side effect of parasitic capacitance has been under control with novel layout structure in sensor cell, and minimal size switch is used to reduce non-ideal effects of MOS switch and achieve good linearity. Power dissipation is also reduced with quiescent current control ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Current Directions in Biomedical Engineering
سال: 2018
ISSN: 2364-5504
DOI: 10.1515/cdbme-2018-0143